CORALIGN™ I5000 Positioner

Travel
Axis Actuator1 Coarse Total
Z - focus 12.7mm (0.5") N/A 12.7mm (0.500")
Y - vertical 0.5mm (0.02") 2mm (0.080") 2.5mm (0.1")
X - lateral 0.5mm (0.02") 2mm (0.080") 2.5mm (0.1")
Yaw 3 degrees N/A 3 degrees
Pitch 3 degrees N/A 3 degrees
Setability2 (Micrometer)
Axis Resolution Movement/Division
Z 0.25 micron (10µ-inch) 0.001"
Y 10nm (0.4µ-inch) 1µm
X 10nm (0.4µ-inch) 1µm
Yaw 0.2 arc sec 30 arc sec
Pitch 0.2 arc sec 30 arc sec
Resolution (Stepper Motor)
Axis Resolution Total Steps
Z 100nm (4µ-inch) 128 000
Y 4nm (0.16µ-inch) 128 000
X  4nm (0.16µ-inch) 128 000
Yaw 0.2 arc sec 60 416
Pitch 0.2 arc sec 60 416
Stage Configuration & Arc Error Motion
Axis  Flexure Type Drive Type Arc Error
Z  Dual Direct Drive None - True Linear Motion
Y  Single 25x Ratio Drive™ Max 30µm - Arc Error in Z only
X  Single 25x Ratio Drive™ Max 30µm - Arc Error in Z only
Yaw  Dual Rotational None
Pitch  Dual Rotational None
Linear Stiffness
Along Axis Stiffness Comments
Z 140 kN/m measured at the rotation center
Y 110 kN/m
X 40 kN/m
Torsional Stiffness
About Axis Stiffness Comments
Z - roll 150 Nm/rad measured at the rotation center
Y - yaw 100 Nm/rad
X - pitch 130 Nm/rad
Maximum Load
Static Load Transient Load Comments
2.2 lbs (1kg) 10 lbs (4.5kg) stage must be protected from shock loading during transport and usage
Physical Properties
Characteristic Specifications Comments
Construction Aluminum 6061 & 7075 - T6 anodized
Weight 1.5kg Approximate
Body Dimensions 5.79"  x 1.75" x 5.19" LxWxH excluding micrometers
Mounting Height 5.19"  Base to top of mounting plate
Mounting Config. 0.26" dia. holes 1.00" x 4.00"3 centers
Concurrent Rotation Center 1/2" Above top of mounting plate
1" Out from end of mounting plate
  • 1  'Actuator' refers to a micrometer or stepper motor.
  • 2 Operator dependent
  • 3 Compatible with 1.00" grid optical tables, units mount on 2" intervals with 0.25" allowance for routing of cables etc.