CORALIGN™ I3000 Positioner

Travel
Axis Actuator1 Coarse Total
Z - focus 12.7mm (0.5") N/A 12.7mm (0.500")
Y - vertical 0.5mm (0.02") 2mm (0.080") 2.5mm (0.1")
X - lateral 0.5mm (0.02") 2mm (0.080") 2.5mm (0.1")
Setability2 (Micrometer)
Axis Resolution Movement/Division
Z 0.25 micron (10µ-inch) 0.001"
Y 10nm (0.4µ-inch) 1µm
X 10nm (0.4µ-inch) 1µm
Resolution (Stepper Motor)
Axis Resolution Total Steps
Z 100nm (4µ-inch) 128 000
Y 4nm (0.16µ-inch) 128 000
X  4nm (0.16µ-inch) 128 000
Stage Configuration & Arc Error Motion
Axis  Flexure Type Drive Type Arc Error
Z  Dual Direct Drive None - True Linear Motion
Y  Single 25x Ratio Drive™ Max 30µm - Arc Error in Z only
X  Single 25x Ratio Drive™ Max 30µm - Arc Error in Z only
Linear Stiffness
Along Axis Stiffness Comments
Z 1600 kN/m measured at the center of the mounting plate
Y 1000 kN/m
X 260 kN/m
Torsional Stiffness
About Axis Stiffness Comments
Z - roll 900 Nm/rad measured at the center of the mounting plate
Y - yaw 1300 Nm/rad
X - pitch 1500 Nm/rad
Maximum Load
Static Load Transient Load Comments
2.2 lbs (1kg) 10 lbs (4.5kg) stage must be protected from shock loading during transport and usage
Physical Properties
Specifications Comments
Construction Aluminum 6061 & 7075 - T6 anodized
Weight 1.0kg Approximate
Body Dimensions 4.50"  x 1.75" x 3.80" LxWxH excluding micrometers
Mounting Height 3.94"  Base to top of mounting plate
Mounting Config. 0.26" dia. holes 1.00" x 4.00"3 centers
  • 1 'Actuator' refers to a micrometer or stepper motor.
  • 2 Operator dependent
  • 3 Compatible with 1.00" grid optical tables, units mount on 2" intervals with 0.25" allowance for routing of cables etc.